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Correction Mechanism Product List

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P-611.XZ, P-611.2 XZ, and XZ Nanopositioner

A compact 2-axis piezo system for nano positioning. A flexure guide nano positioning system with a footprint of 44x44mm.

The P-611.1 piezo stage is a flexure guide nanopositioning system with a footprint of just 44 x 44 mm. 【Features】 ○ Compact design: footprint of 44 x 44 mm ○ Stroke up to 120 x 120 μm ○ Resolution up to 0.2 nm ○ Low-cost mechanical/electronic system configuration ○ Frictionless precision flexure guide system ○ Remarkable long lifespan with PICMA(TM) piezo actuators ○ Available in X, Z, and XYZ versions ● For more details, please contact us or refer to the catalog.

  • P-611_KUZ.jpg
  • P-611_KUZ_02.jpg
  • Piezoelectric Devices
  • Actuator
  • encoder
  • Correction Mechanism

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Z-chip tilt opening piezo stage P-5x8

The nano-level motion amount is 100µm and 200µm on the Z-axis, with chip tilt axes of 1mrad and 2mrad, and is optimal for transmitted light with a 66mm aperture.

The P-5x8 series features the piezo nano stage P-518.TCD with chip tilt and the long-stroke version P-528.TCD/ZCD, both developed on the same platform. It achieves a system resolution of 0.8 nm and a linearity error of 0.03% using highly reliable PICMA piezo ceramics, flexure guides, parallel kinematics, and capacitive sensors. The large aperture of 66 × 66 mm is suitable for interferometric measurements and transmitted light applications, with a load capacity of 50N, making it ideal for semiconductor testing, photonics, microscopy, and high-precision alignment. *For more details, please download the PDF or contact us.

  • Actuator
  • Piezoelectric Devices
  • encoder
  • Correction Mechanism

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